Byeonghwan (Brian) Jeon

Research Professor | University Industry Collaboration

Artificial Intelligence (AI) Convergence Research Center, Inha University

+82-10-4239-0283, bjeon2k@inha.ac.kr

 

EDUCATION


 

□ Seoul National University                                    Seoul, Korea

   Ph.D. in Electrical and Computer Engineering           Mar. 1996 – Feb. 2004

   Thesis

 

□ Seoul National University                                    Seoul, Korea

   M.S. in Control & Instrumentation Engineering         Mar. 1988 – Feb. 1990

   Thesis

 

□ Seoul National University                                    Seoul, Korea

   B.S. in Control & Instrumentation Engineering          Mar. 1984 – Feb. 1988

 

WORK EXPERIENCE


 

□ Artificial Intelligence (AI) Convergence Research Center, Inha University [2021 - Present]

⊙ Professor (University-Industry Collaboration): 2021 – Present

 

□ Electrical & Computer Engineering, Seoul National University [2019 - 2020]

⊙ Professor (University-Industry Collaboration): 2019 – 2020 (2 years)

 

□ Mechatronics R&D Center, Samsung Electronics Co., Ltd. [1990 – 2018]

⊙ Master: 2011 – 2018 (8 years)

⊙ Principal Engineer: 2003 – 2010 (8 years)

⊙ Senior Engineer: 1995 – 2002 (8 years)

⊙ Junior Engineer: 1992 – 1994 (3 years)

⊙ Assistant Engineer: 1990 – 1991 (2 years)

 

EXPERTISES in Equipment and Software Technology Development


 

□ Stand-alone metrology & inspection equipment for manufacturing semiconductors, such as

Optical Defect Review System, Defect Review SEM (Scanning Electron Microscope), Macro

Defect Inspection System, Nano Defect Inspection System, Scanning Probe Microscope,

Microscopic Hyper-spectral Inspection System, EUV (Extreme Ultraviolet) Mask Defect

Review System, and EUV Mask CD (Critical Dimension) & Reflectance Measurement System

 

□ Metrology & inspection software server technologies for manufacturing semiconductors,

such as Image-based Inspection Software Server, Spectrum-based Optical CD Measurement

Software Server, and Automatic TEM (Transmission Electron Microscope) Image

Measurement Software Server

 

□ Integrated metrology & inspection technologies for manufacturing semiconductors, such as

Spinner Macro Defect Detection, In-situ Measurement of CMP (Chemical Mechanical

Polishing) Pad Profile, CMP Macro Defect Detection, In-situ Measurement of Particles in

CMP Clean Bath; Thickness Measurement for Etch, CVD (Chemical Vapor Deposition), and

CMP Process; Measurement of Particles in Chemical Liquids, Concentration Measurement

for CCSS (Central Chemical Supply System), Particle Measurement of NPW (Non-Pattern

Wafer), and Particle Inspection for Mask Manufacturing Process Equipment

 

□ Metrology & inspection equipment technologies for manufacturing LCD (Liquid Crystal Display),

such as Automated Optical Inspection, Automatic Visual Tester of TFT (Thin Film Transistor)

Process, Automatic Module Tester of Module Assembly Process, and Automatic Final Tester of

Final Assembly Process

 

□ Metrology & inspection software technologies for manufacturing LCD, such as Recipe

Management System, Real-time Defect Tracking System from TFT Process to Final Assembly

Process, Detection of Local Non-Uniformity Defects in Photo-Lithography Process, and

Automatic Local Non-Uniformity Compensation at Liquid Crystal Process & Module

Assembly Process

 

□ Metrology & inspection technologies for manufacturing home appliance products, such as

TV Panel Inspection System, Parts Inspection Systems for Vacuum Cleaners, Automatic Cloth

Washers, and Automatic Air Conditioners

 

□ Core technologies for metrology & inspection equipment and software, such as Pattern

Analysis & Classification, Computer Vision, General Image Processing Algorithms, Machine

Learning, Electronic & Electrical High-Speed Circuit Design, Analog & Digital Signal

Processing, Equipment Control & Operational Software, Optical System Design, Opto-

mechanical System Design, Computational Imaging, Spectroscopy, Microscopy, Optical

Information Processing, and Mechanical System Design

 

JOURNAL PUBLICATIONS


 

Face detection using the 1st-order RCE classifier, EURASIP Journal on Applied Signal

Processing, 2003

 

Augmentation of defect image data using GAN, Journal of the Institute of Electronics and

Information Engineers, volume 59, pages 98-108, October 2022, South Korea.

 

Synthesizing industrial defect images under data imbalance, IEEE Access, volume 11,

pages 111335-111346, October 2023

 

CONFERENCE PRESENSTATIONS and TALKS


 

Performance analysis on polygonal approximation algorithms, Signal Processing Workshop,

1988, South Korea

 

A Real-Time Implementation of the Vision System for SMT Automation,

Journal of the Institute of Electronics and Information Engineers 27(6), 1990, South Korea

 

Robot Controller With 32-Bit DSP Chip,

Workshop of The Institute of Electronics and Information Engineers, 1991, South Korea

 

Suppression Method of Disturbance Torque Due to System Drift via an Observer in the Robot Control System,

International Federation of Automatic Control, 1992, South Korea

 

Rotation invariant face detection using a model-based clustering algorithm,

IEEE International Conference on Multimedia and Expo, 2000, USA

 

□ A study on image quality enhancement techniques for PCB X-ray images,

Workshop on Advanced Manufacturing System, 2002, South Korea

 

Face detection using the 1st-order RCE classifier, IEEE International Conference

on Image Processing, 2002, Canada

 

□ PCB Inspection using X-ray imaging, Workshop on Image Processing, 2003, South Korea

 

□ Augmentation of defect image data using GAN, 34th Workshop on Image Processing and

Image Understanding, Feb. 2022, South Korea

 

□ StyleGAN based data augmentation to alleviate defect image data imbalance, Summer

Annual Conference on the Institute of Electronics and Information Engineers, Jun. 2022, South Korea

 

□ Comparing defect image classification methods, Summer Annual Conference on the

Institute of Electronics and Information Engineers, Jun. 2022, South Korea.

 

AWARDS and HONORS


□ The Annual Award for Excellent Engineers, Jan. 2005

□ The Annual Samsung Proud People Awards for Technology, Dec. 2012

□ The Awards for Future Creators of Device Solutions, Oct. 2014

 

CERTIFICATIONS


□ Green Belt of 6 Sigma

□ Black Belt of 6 Sigma

 

SKILLS


□ Computer Programming Language: C, C++, Java

 

PATENTS


□ United States (Keywords: Byeong Hwan Jeon @ patents.justia.com): 35 Articles

No

Title

1

EUV generation device

2

EUV mask inspection apparatus and method, and EUV mask manufacturing method including EUV mask inspection method

3

Light generator including debris shielding assembly, photolithographic apparatus including the light generator, and method of manufacturing integrated circuit device using the photolithographic apparatus

4

Apparatus for inspecting material property of plurality of measurement objects

5

Method of inspecting surface having a minute pattern based on detecting light reflected from metal layer on the surface

6

Clock signal generators and substrate inspecting apparatuses having the same

7

Method of forming nanorod structure and method of forming semiconductor device using the same

8

Atomic emission spectrometer based on laser-induced plasma (lip), semiconductor manufacturing facility including the atomic emission spectrometer, and method of manufacturing semiconductor device using the atomic emission spectrometer

9

Surface inspecting method

10

Plasma light source and inspection apparatus including the same

11

Optical inspection apparatus and method and method of fabricating semiconductor device using the apparatus

12

Wafer inspection apparatus and wafer inspection method using the same

13

Apparatus for focus control and method for manufacturing semiconductor device

14

Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system

15

Inspecting surfaces

16

Plasma light source apparatus and light source system including the same

17

Optical inspecting apparatus

18

Method of inspecting a surface of an object and optical system for performing the same

19

Data processing apparatus

20

Rod lens for lighting apparatus, lighting apparatus including the same and semiconductor manufacturing method using the apparatus

21

Light source device and semiconductor manufacturing apparatus including the same

22

Plasma light source apparatus and plasma light generating method

23

Plasma light source, inspection apparatus including plasma light source, and method of generating plasma light

24

Reflector structure of illumination optic system

25

Optical measurement apparatus and method of controlling the same

26

Objective lens assembly having catadioptric group

27

Auto focusing devices for optical microscopes

28

Broadband light illuminators

29

Scanning electron microscope

30

Surface Profile Measurement System

31

Optical measurement apparatus and method of controlling the same

32

System and method for providing light

33

Inspecting apparatus and method

34

Pickup inspecting apparatus

35

Robot control method

 

□ Korea (Keywords: “전병환*삼성전자” @ www.kipris.or.kr): 46 Articles (등록 + 소멸)

No

Title

1

극자외선 생성 장치

2

EUV 마스크 검사 장치와 방법, 및 그 방법을 포함한 EUV 마스크 제조방법

3

검사 계측 장치 그리고 그의 검사 계측 방법

4

파편 차단 조립체를 구비한 광 발생 장치 및 포토리소그래피 장치와 이를 이용하는 집적회로 소자의 제조 방법

5

소재 물성 검사 장치

6

웨이퍼를 검사하기 위한 검사 장치 및 이를 이용한 웨이퍼의 검사 방법

7

웨이퍼 검사 장치 및 이를 이용한 웨이퍼 검사 방법

8

클럭 신호 생성기 및 기판 검사 장치

9

검사 장치, 그를 포함하는 반도체 소자의 제조 시스템, 및 반도체 소자의 제조 방법

10

자동 초점 조정 장치 및 반도체 소자의 제조 방법

11

광학 검사 장치, 기판 검사 방법, 그리고 기판 제조 방법

12

플라즈마 광원, 및 그 광원을 포함하는 검사 장치

13

광학 검사 장치

14

피검체의 표면 검사 방법 및 이를 수행하기 위한 광학 시스템

15

광 변환 모듈 및 광학 측정 시스템

16

플라즈마 광원, 그 광원을 구비한 검사 장치 및 플라즈마 광 생성 방법

17

플라즈마 광원 장치 및 플라즈마 광 생성 방법

18

조명 광학계의 반사체 구조

19

광원 장치 및 광 생성 방법

20

광학 현미경의 자동 초점 조절 장치

21

정전 척에서 웨이퍼를 디척킹하는 장치 및 방법

22

검사장치 및 그 방법

23

디바이스 테스트 장치 및 방법과, 그 인터페이스 장치

24

광원 소자 및 이를 포함하는 반도체 제조 장치

25

기판의 건식 세정공정

26

건식 표면 클리닝 장치

27

패널검사장치

28

픽업 검사장치

29

픽업 검사장치

30

정전기 보호회로

31

영상 신호의 지터 제거 장치

32

비젼 검사 장치

33

동기신호발생장치

34

정전기유입차단수단을가진칼라컨버젼스검사장치

35

광픽업용대물렌즈의경사도측정장치

36

레이저를이용한비접촉식높이측정장치

37

스트라이프중심추출회로및이를이용한비젼시스템

38

영상처리장치에서의입출력용단일루크업테이블

39

윈도우신호발생장치

40

물체의중심점추출장치

41

피사체의밝기분포추출회로

42

윈도우신호발생장치

43

샘플/홀더를이용한다축서보제어방법

44

로보트제어기에서의옵셋보상방법

45

컨벌루션을이용한로보트의궤적발생방법

46

로직스위치를이용한메모리영역의다중화장치